Gettering on Cavities Induced by Helium Implantation in Si: The Case of Boron

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Gettering on Cavities Induced by Helium Implantation in Si: The Case of Boron

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 6193736

Material type: 記事

Author: Daniel Alquierほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2002-06

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 41(6A) (通号 559) 2002.6

Publication Page: p.3625～3628

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Detailed bibliographic record

Summary, etc.：: In this paper, we shed light on the strong interaction between the cavity layer induced by helium implantation and boron. First, we present the impact...

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Material Type: 記事
Title: Gettering on Cavities Induced by Helium Implantation in Si: The Case of Boron
Author/Editor: Daniel Alquier
Fabrice Roqueta
Laurent Ventura 他
Author Heading: Daniel Alquier
Fabrice Roqueta
Laurent Ventura
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 41(6A) (通号 559) 2002.6
Volume: 41
Issue: 6A
Sequential issue number: 559
Pages: 3625～3628
Publication date of volume/issue (W3CDTF): 2002-06
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: ion implantaion
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226628
https://dl.ndl.go.jp/pid/11226628
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6193736
http://id.ndl.go.jp/bib/6193736
Bibliographic Record Category (NDL): 632