Correspondence between Surface Morphological Faults and Crystallographic Defects in 4H-SiC Homoepitaxial Film

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Correspondence between Surface Morphological Faults and Crystallographic Defects in 4H-SiC Homoepitaxial Film

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 6357872

Material type: 記事

Author: Tatsuya Okadaほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2002-11

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 41(11A) (通号 566) 2002.11

Publication Page: p.6320～6326

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Summary, etc.：: Conventional transmission electron microscopy was applied to study the nature of crystallographic defects under some types of surface morphological fa...

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Material Type: 記事
Title: Correspondence between Surface Morphological Faults and Crystallographic Defects in 4H-SiC Homoepitaxial Film
Author/Editor: Tatsuya Okada
Tsunenobu Kimoto
Hiroshi Noda 他
Author Heading: Tatsuya Okada
Tsunenobu Kimoto
Hiroshi Noda
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 41(11A) (通号 566) 2002.11
Volume: 41
Issue: 11A
Sequential issue number: 566
Pages: 6320～6326
Publication date of volume/issue (W3CDTF): 2002-11
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: homoepitaxy
off-cut substrate
surface morphological fault
transmission electron mictoscopy
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226634
https://dl.ndl.go.jp/pid/11226634
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6357872
http://id.ndl.go.jp/bib/6357872
Bibliographic Record Category (NDL): 632