半導体配線用超微細金線の製造技術と諸特性 (特集塑性変形を利用した高付加価値加工)

半導体配線用超微細金線の製造技術と諸特性

(特集塑性変形を利用した高付加価値加工)

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Material Type: 記事
Title: 半導体配線用超微細金線の製造技術と諸特性
Author/Editor: 板橋一光
Series Title: 特集塑性変形を利用した高付加価値加工
Author Heading: 板橋一光
Periodical title: バウンダリー : 材料開発ジャーナル / コンパス社 [編]
No. or year of volume/issue: 19(7) (通号 218) 2003.7
Volume: 19
Issue: 7
Sequential issue number: 218
Pages: 8～12
Publication date of volume/issue (W3CDTF): 2003-07
ISSN (Periodical Title): 0916-2402
ISSN-L (Periodical Title): 0916-2402
Publication (Periodical Title): 横浜 : コンパス社
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 超極細金線
NDLC: ZM16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-1502
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6829427
http://id.ndl.go.jp/bib/6829427
Bibliographic Record Category (NDL): 632