Crystal Defects in Epitaxial Layer on Nitrogen-doped Czochralski-grown Silicon Substrate(2)Suppression of the Crystal Defects in Epitaxial Layer by the Control of Crystal Growth Condition and Carbon Co-doping

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Crystal Defects in Epitaxial Layer on Nitrogen-doped Czochralski-grown Silicon Substrate(2)Suppression of the Crystal Defects in Epitaxial Layer by the Control of Crystal Growth Condition and Carbon Co-doping

Call No. (NDL): Z53-A375
Bibliographic ID of National Diet Library: 6930894

Material type: 記事

Author: Katsuhiko Nakaiほか

Publisher: Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Publication date: 2004-04

Material Format: Digital

Journal name: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 43(4A) (通号 590) 2004.4

Publication Page: p.1247～1253

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Summary, etc.：: Two types of crystal defects, stacking fault induced by a nitrogen-doped substrate (N-SF) and elliptical pit (E-pit), are generated in the epitaxial l...

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Material Type: 記事
Title: Crystal Defects in Epitaxial Layer on Nitrogen-doped Czochralski-grown Silicon Substrate(2)Suppression of the Crystal Defects in Epitaxial Layer by the Control of Crystal Growth Condition and Carbon Co-doping
Author/Editor: Katsuhiko Nakai
Koichi Kitahara
Yasumitsu Ohta 他
Author Heading: Katsuhiko Nakai
Koichi Kitahara
Yasumitsu Ohta
Periodical title: Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue: 43(4A) (通号 590) 2004.4
Volume: 43
Issue: 4A
Sequential issue number: 590
Pages: 1247～1253
Publication date of volume/issue (W3CDTF): 2004-04
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: crystal defect
NDLC: ZM35
Target Audience: 一般
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z53-A375
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/11226661
https://dl.ndl.go.jp/pid/11226661
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 6930894
http://id.ndl.go.jp/bib/6930894
Bibliographic Record Category (NDL): 632