メタン/水素マイクロ波プラズマCVD法による純チタン基板上のナノダイヤモンド成膜

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Material Type: 記事
Title: メタン/水素マイクロ波プラズマCVD法による純チタン基板上のナノダイヤモンド成膜
Author/Editor: Cheolmun Yim
辛道勲
林祐輔他
Author Heading: Cheolmun Yim
辛道勲
林祐輔
Periodical title: 材料 / 日本材料学会 [編]
No. or year of volume/issue: 54(1) 2005.1
Volume: 54
Issue: 1
Pages: 73～78
Publication date of volume/issue (W3CDTF): 2005-01
ISSN (Periodical Title): 0514-5163
ISSN-L (Periodical Title): 0514-5163
Publication (Periodical Title): 京都 : 日本材料学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Mircocrystalline diamond
Nanocrystalline diamond
Pure titanium substrate
Surface roughness
MPCVD
NDLC: ZM16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-267
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 7221016
http://id.ndl.go.jp/bib/7221016
Bibliographic Record Category (NDL): 632