雑誌電子材料
Volume number44(10)-44(12) 20051000-20051200
Article半導体微細加工技術を...

半導体微細加工技術を用いたガラスチップ製造法 (特集 流体MEMSのすべて--マイクロ流体デバイスの応用展開とその実用化)

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半導体微細加工技術を用いたガラスチップ製造法

(特集 流体MEMSのすべて--マイクロ流体デバイスの応用展開とその実用化)

Call No. (NDL)
Z16-225
Bibliographic ID of National Diet Library
7714053
Material type
記事
Author
渡慶次 学
Publisher
東京 : 工業調査会
Publication date
2005-11
Material Format
Paper
Journal name
電子材料 44(11) 2005.11
Publication Page
p.26～28
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Paper

Material Type
記事
Title
半導体微細加工技術を用いたガラスチップ製造法
Author/Editor
渡慶次 学
Series Title
特集 流体MEMSのすべて--マイクロ流体デバイスの応用展開とその実用化
Author Heading
渡慶次 学
Periodical title
電子材料
No. or year of volume/issue
44(11) 2005.11
Volume
44
Issue
11
Pages
26～28