ターゲットにポリイミ...

ターゲットにポリイミドを用いて作製したスパッタ高分子薄膜の摩擦・摩耗特性と銅基板との密着性(窒素ガスの効果)

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ターゲットにポリイミドを用いて作製したスパッタ高分子薄膜の摩擦・摩耗特性と銅基板との密着性(窒素ガスの効果)

Call No. (NDL)
Z17-134
Bibliographic ID of National Diet Library
7860671
Material type
記事
Author
岩森 暁ほか
Publisher
大阪 : 日本接着学会
Publication date
2006
Material Format
Paper
Journal name
日本接着学会誌 = Journal of the Adhesion Society of Japan : adhesion 42(3) 2006
Publication Page
p.89~96
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Paper Digital

Material Type
記事
Author/Editor
岩森 暁
上村 彰宏
Periodical title
日本接着学会誌 = Journal of the Adhesion Society of Japan : adhesion
No. or year of volume/issue
42(3) 2006
Volume
42
Issue
3
Pages
89~96
Publication date of volume/issue (W3CDTF)
2006