希薄NaCl電解還元...

希薄NaCl電解還元水を用いたシリコンウエハの精密研磨

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希薄NaCl電解還元水を用いたシリコンウエハの精密研磨

Call No. (NDL)
Z74-D889
Bibliographic ID of National Diet Library
8536840
Material type
記事
Author
佐藤 運海ほか
Publisher
東京 : 精密工学会
Publication date
2006-10
Material Format
Paper
Journal name
精密工学会誌論文集 / 会誌編集委員会 編 72(10) (通号 862) 2006.10
Publication Page
p.1247~1252
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Paper

Material Type
記事
Author/Editor
佐藤 運海
市川 浩一郎
Periodical title
精密工学会誌論文集 / 会誌編集委員会 編
No. or year of volume/issue
72(10) (通号 862) 2006.10
Volume
72
Issue
10
Sequential issue number
862
Pages
1247~1252