低エネルギー質量分離イオンビーム照射装置を用いたネオンによる金のスパッタ率の測定 (第47回真空に関する連合講演会プロシーディングス--2006年11月7日～9日,大阪)
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- Material Type
- 記事
- Author/Editor
- 日根 清裕吉村 智木内 正人 他
- Series Title
- Alternative Title
- Measurement of Au sputtering yields by neon with low-energy mass analyzed ion beam system
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 50(3) 2007.3
- Volume
- 50
- Issue
- 3