最近の展望 窒化物半導体薄膜の走査プローブ顕微鏡による微視的評価
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- Material Type
- 記事
- Author/Editor
- 高村(山田) 由起子王 治涛藤川 安仁 他
- Author Heading
- Alternative Title
- Recent developments: Surface studies of nitride thin films using scanning probe microscopy
- Periodical title
- 応用物理
- No. or year of volume/issue
- 76(5) 2007.5
- Volume
- 76
- Issue
- 5
- Pages
- 499～504