微細トランジスタ技術と信頼性--3次元構造トランジスタ(先端LSI技術と信頼性)

Journal name: 信頼性 = The journal of Reliability Engineering Association of Japan : 日本信頼性学会誌 29(4) (通号 160) 2007.7

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Material Type: 記事
Title: 微細トランジスタ技術と信頼性--3次元構造トランジスタ
Author/Editor: 馬場智也
Series Title: 先端LSI技術と信頼性
Author Heading: 馬場智也
Alternative Title: Scaled MOSFET technology and reliability: 3 dimensional structure MOSFETs
Periodical title: 信頼性 = The journal of Reliability Engineering Association of Japan : 日本信頼性学会誌
No. or year of volume/issue: 29(4) (通号 160) 2007.7
Volume: 29
Issue: 4
Sequential issue number: 160
Pages: 212～225
Publication date of volume/issue (W3CDTF): 2007-07
ISSN (Periodical Title): 0919-2697
ISSN-L (Periodical Title): 0919-2697
Publication (Periodical Title): 東京 : 日本信頼性学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM1
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-2023
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8890619
http://id.ndl.go.jp/bib/8890619
Bibliographic Record Category (NDL): 632