SPMを用いたSi単結晶のナノ加工と表面の構造変化
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- Material Type
- 記事
- Author/Editor
- 吉田 浩也松室 昭仁岩田 博之 他
- Alternative Title
- Nanoprocessing on silicon (100) surface by using SPM and the study of the structural change
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 73(10) (通号 874) 2007.10
- Volume
- 73
- Issue
- 10
- Sequential issue number
- 874