プラズマ成膜プロセスにおけるサブサーフェスでの反応過程解析
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- Material Type
- 記事
- Author/Editor
- 篠原 正典藤山 寛
- Alternative Title
- Investigation of reactions at the subsurface region in plasma film deposition process
- Periodical title
- プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編
- No. or year of volume/issue
- 83(12) 2007.12
- Volume
- 83
- Issue
- 12
- Pages
- 935～941