放射光を用いた窒化アルミニウム-銅積層膜の熱応力その場測定 (小特集 結晶回折法および電子線後方散乱法による材料評価)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 日下 一也英 崇夫金子 健太 他
- Series Title
- Alternative Title
- In-situ thermal stress measurement in multi-layered aluminum nitride and copper films by synchrotron radiation
- Periodical title
- 日本機械学会論文集. A編
- No. or year of volume/issue
- 74(739) 2008.3
- Volume
- 74
- Issue
- 739