Holdings of Libraries in Japan
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 渡邊 克己福地 昭大内 昌雄 他
- Alternative Title
- Oyamada Memorial lecture: Development of production method of substrate holder for manufacturing equipments of semiconductor and flat panel display
- Periodical title
- 軽金属
- No. or year of volume/issue
- 58(3) (通号 569) 2008.3
- Volume
- 58
- Issue
- 3
- Sequential issue number
- 569