次世代測定技術:CD計測は32nm以降に対応

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: 次世代測定技術:CD計測は32nm以降に対応
Author/Editor: Alexander E. Braun
Author Heading: Alexander E. Braun
Alternative Title: CD metrology confidently looks beyond 32 nm
Periodical title: Semiconductor international. 日本版
No. or year of volume/issue: 5(8) 2008.8
Volume: 5
Issue: 8
Pages: 16～21
Publication date of volume/issue (W3CDTF): 2008-08
ISSN (Periodical Title): 1349-6425
ISSN-L (Periodical Title): 1349-6425
Publication (Periodical Title): 東京 : リード・ビジネス・インフォメーション
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-E304
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 9595667
http://id.ndl.go.jp/bib/9595667
Bibliographic Record Category (NDL): 632