Vacuum Equipment and Application for Thin Film in the Multimedia. Deposition Technique for Capacitor Films with High Dielectric Constant. 48 11

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Vacuum Equipment and Application for Thin Film in the Multimedia. Deposition Technique for Capacitor Films with High Dielectric Constant.

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Material Type: 記事
Title: Vacuum Equipment and Application for Thin Film in the Multimedia. Deposition Technique for Capacitor Films with High Dielectric Constant.
Volume: 48
11
Author/Editor: 川原孝昭
Author Heading: KAWAHARA Takaaki
川原孝昭
Publication Date: 1997
Publication Date (W3CDTF): 1997
Alternative Title: マルチメディア時代における真空装置と薄膜応用　　高誘電率薄膜成膜技術
Periodical title: 表面技術
Journal of The Surface Finishing Society of Japan
No. or year of volume/issue: 48 11
Volume: 48
Issue: 11
Pages: 1054-1058
ISSN (Periodical Title): 0915-1869
1884-3409
ISSN-L (Periodical Title): 0915-1869
Alias of Author: KAWAHARA Takaaki
Subject Heading: Liquid Source CVD
BST
Capacitor
Gbit-scale DRAM
Target Audience: 一般
DOI: 10.4139/sfj.48.1054
Access Restrictions: インターネット公開
Data Provider (Database): 科学技術振興機構 : J-STAGE