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Bibliographic Record
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- Material Type
- 記事
- Volume
- 4811
- Author/Editor
- 川原 孝昭
- Author Heading
- Publication Date
- 1997
- Publication Date (W3CDTF)
- 1997
- Alternative Title
- マルチメディア時代における真空装置と薄膜応用 高誘電率薄膜成膜技術
- Periodical title
- 表面技術Journal of The Surface Finishing Society of Japan
- No. or year of volume/issue
- 48 11