Polysilane Anti-Reflective Layer for Deep UV Lithography

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Material Type: 記事
Title: Polysilane Anti-Reflective Layer for Deep UV Lithography
Author/Editor: Yasuhiko Sato
Seiro Miyoshi
Hideto Matsuyama 他
Author Heading: Yasuhiko Sato
Seiro Miyoshi
Hideto Matsuyama
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 12(4) 1999
Volume: 12
Issue: 4
Pages: 663～668
Publication date of volume/issue (W3CDTF): 1999
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4788826
http://id.ndl.go.jp/bib/4788826
Bibliographic Record Category (NDL): 632