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Development of Photocuring Acrylic/silica Organic-Inorganic Hybrid for Negative Resists

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Development of Photocuring Acrylic/silica Organic-Inorganic Hybrid for Negative Resists

Call No. (NDL)
Z53-W515
Bibliographic ID of National Diet Library
5833263
Material type
記事
Author
Kimihiro Matsukawaほか
Publisher
Chiba : The Society of Photopolymer Science and Technology
Publication date
2001
Material Format
Paper
Journal name
Journal of photopolymer science and technology 14(2) 2001
Publication Page
p.181~184
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Paper Digital

Material Type
記事
Author/Editor
Kimihiro Matsukawa
Yukihito Matsuura
Hiroshi Inoue 他
Periodical title
Journal of photopolymer science and technology
No. or year of volume/issue
14(2) 2001
Volume
14
Issue
2
Pages
181~184
Publication date of volume/issue (W3CDTF)
2001