フリーマン型イオン源におけるメチルシランのフラグメントイオンとタングステンワイヤ表面状態

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Material Type: 記事
Title: フリーマン型イオン源におけるメチルシランのフラグメントイオンとタングステンワイヤ表面状態
Author/Editor: 藤章至
吉村智
杉本敏司他
Author Heading: 藤章至
吉村智
杉本敏司
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 49(6) 2006.6
Volume: 49
Issue: 6
Pages: 383～385
Publication date of volume/issue (W3CDTF): 2006-06
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 8019697
http://id.ndl.go.jp/bib/8019697
Bibliographic Record Category (NDL): 632