同心円回折格子干渉計を用いた軸受のラジアル アキシャル アンギュラモーションの同時測定法 : 第2 報：光学センサーの性能評価 2011A 0
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- Material Type
- 記事
- Volume
- 2011A0
- Author/Editor
- 明田川 正人マディン ムハマッドスアエッテイム ジャラスイ奥山 栄樹
- Author Heading
- Publication Date
- 2011
- Publication Date (W3CDTF)
- 2011
- Alternative Title
- Concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometers : 2nd report: Performance evaluation of the optical sensor
- Periodical title
- 精密工学会学術講演会講演論文集Proceedings of JSPE Semestrial Meeting
- No. or year of volume/issue
- 2011A 0