ターボ分子ポンプの仕組みと選定について

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Material Type: 記事
Title: ターボ分子ポンプの仕組みと選定について
Author/Editor: 廣瀬均
Author Heading: 廣瀬均
Alternative Title: The New Generation in Turbo Molecular Pump Engineering-Turbovac i and How to Select TMPs
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 58(12):2015.12
Volume: 58
Issue: 12
Pages: 446-450
Publication date of volume/issue (W3CDTF): 2015-12
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 026998767
http://id.ndl.go.jp/bib/026998767
Bibliographic Record Category (NDL): 632