AESを利用した極低入射電圧SEM像におけるコントラスト反転現象の解明

Detailed bibliographic record

Summary, etc.：: <p>In recent years, SEM has made it possible to acquire a backscattered electron (BSE) compositional image of the sample surface at a low incident vol...

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Material Type: 記事
Title: AESを利用した極低入射電圧SEM像におけるコントラスト反転現象の解明
Volume: 2019
0
Author/Editor: 作田裕介
朝比奈俊輔
堤建一
小野寺浩
Author Heading: Sakuda Yusuke
作田裕介
Asahina Shunsuke
朝比奈俊輔
Tsutsumi Kenichi
堤建一
Onodera Hiroshi
小野寺浩
Publication Date: 2019
Publication Date (W3CDTF): 2019
Alternative Title: Investigation of contrast reversal phenomenon in SEM images under low incident acceleration voltage using AES
Periodical title: 日本表面真空学会学術講演会要旨集
Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
No. or year of volume/issue: 2019 0
Volume: 2019
Issue: 0
Pages: 1P57
ISSN (Periodical Title): 2434-8589
Alias of Author: Sakuda Yusuke
Asahina Shunsuke
Tsutsumi Kenichi
Onodera Hiroshi
Target Audience: 一般
DOI: 10.14886/jvss.2019.0_1P57
Access Restrictions: インターネット公開
Data Provider (Database): 科学技術振興機構 : J-STAGE
http://www.jstage.jst.go.jp