光干渉リソグラフィにおける干渉定在波の「その場」観察に関する研究

Detailed bibliographic record

Summary, etc.：: <p>In the non-orthogonal Lloyd’s mirror interferometer based on the laser interference lithography, the pitch of interference fringe pattern is contro...

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Material Type: 記事
Title: 光干渉リソグラフィにおける干渉定在波の「その場」観察に関する研究
Volume: 2023
0
Author/Editor: 高廣望
清水裕樹
Author Heading: TAKAHIRO Nozomu
高廣望
SHIMIZU Yuki
清水裕樹
Publication Date: 2023
Publication Date (W3CDTF): 2023
Alternative Title: In-situ evaluation of interference fringe patterns to be generated by interference lithography
Periodical title: IIP情報・知能・精密機器部門講演会講演論文集
The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
No. or year of volume/issue: 2023 0
Volume: 2023
Issue: 0
Pages: IIPA-6-1
ISSN (Periodical Title): 2424-3140
Alias of Author: TAKAHIRO Nozomu
SHIMIZU Yuki
Subject Heading: Precision positioning
Scale grating
Micropattern fabrication
Metrology
Laser interference lithography
Target Audience: 一般
DOI: 10.1299/jsmeiip.2023.IIPA-6-1
Access Restrictions: インターネット公開
Data Provider (Database): 科学技術振興機構 : J-STAGE
http://www.jstage.jst.go.jp