ホローカソード放電のインパルス駆動による細穴内面DLC成膜（その２）

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Summary, etc.：: <p>Plasma CVD requires the generation of high-density plasma when depositing films on the internal surface of millimeter-size tubes. Hollow cathode di...

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Material Type: 記事
Title: ホローカソード放電のインパルス駆動による細穴内面DLC成膜（その２）
Volume: 2024.23
0
Author/Editor: 川口寧々
上坂裕之
Author Heading: 川口寧々
上坂裕之
Publication Date: 2024
Publication Date (W3CDTF): 2024
Alternative Title: DLC coating inside a small metal tube using impulse-driven hollow cathode discharge (No. 2)
Periodical title: 機素潤滑設計部門講演会講演論文集
The Proceedings of the Machine Design and Tribology Division meeting in JSME
No. or year of volume/issue: 2024.23 0
Volume: 2024.23
Issue: 0
Pages: 2A2-4
ISSN (Periodical Title): 2424-3051
Subject Heading: Internal coating
DLC
surface treatment
Hollow Cathode Dischage
plasma CVD
Target Audience: 一般
DOI: 10.1299/jsmemdt.2024.23.2A2-4
Access Restrictions: インターネット公開
Data Provider (Database): 科学技術振興機構 : J-STAGE
http://www.jstage.jst.go.jp