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CVD法を用いたサファイア基板上h-BNの合成制御 2022.1 0

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CVD法を用いたサファイア基板上h-BNの合成制御

Material type
記事
Author
原田 哲匡ほか
Publisher
-
Publication date
2022-02-25
Material Format
Digital
Journal name
応用物理学会学術講演会講演予稿集 2022.1 0
Publication Page
p.2964-2964
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Digital

Material Type
記事
Volume
2022.1
0
Author/Editor
原田 哲匡
八木 龍斗
川合 良知
佐々木 拓生
日比野 浩樹
Publication Date
2022-02-25
Publication Date (W3CDTF)
2022-02-25
Alternative Title
Controlled growth of h-BN on sapphire substrates using CVD
Periodical title
応用物理学会学術講演会講演予稿集
JSAP Annual Meetings Extended Abstracts
No. or year of volume/issue
2022.1 0