博士論文

半導体基板上への常誘電性および強誘電性弗化物薄膜の形成とデバイス応用に関する研究

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半導体基板上への常誘電性および強誘電性弗化物薄膜の形成とデバイス応用に関する研究

Material type
博士論文
Author
會澤, 康治ほか
Publisher
-
Publication date
1996-02
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
東京工業大学,博士(工学)
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Note (General):

identifier:oai:t2r2.star.titech.ac.jp:99000833

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Digital

Material Type
博士論文
Author/Editor
會澤, 康治
AIZAWA, KOJI
Publication Date
1996-02
Publication Date (W3CDTF)
1996-02
Degree grantor/type
東京工業大学
Date Granted
1996-10-30
Dissertation Number
B2963
Degree Type
博士(工学)