文書・図像類

加熱TEM観察を利用したPb(Zr,Ti)O_3_強誘電体薄膜における残留応力のin-situ測定による強誘電体メモリ特性の向上に関する研究

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加熱TEM観察を利用したPb(Zr,Ti)O_3_強誘電体薄膜における残留応力のin-situ測定による強誘電体メモリ特性の向上に関する研究

Material type
文書・図像類
Author
木口, 賢紀ほか
Publisher
村田学術振興財団年報
Publication date
2001-12
Material Format
Paper
Capacity, size, etc.
-
NDC
-
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identifier:oai:t2r2.star.titech.ac.jp:00062629

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Paper

Material Type
文書・図像類
Author/Editor
木口, 賢紀
KIGUCHI, TAKANORI
Publication, Distribution, etc.
Publication Date
2001-12
Publication Date (W3CDTF)
2001-12
Alternative Title
Study for improvement of Ferroelectric RAM by residual stress measurment by heating in-situ TEM analysis
Periodical title
村田学術振興財団年報
No. or year of volume/issue
15