A Trial Manufacturing of Micromechanism Elements by Use of a Fast Atom Beam Etching Machine

Publisher: Micro System Technologies 2003 (International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components),Herbert Reichl(Editor),2003 Franzis Verlag GmbH, 85586 Point, ISBN 3-7723-7020-9

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Material Type: 図書
Title: A Trial Manufacturing of Micromechanism Elements by Use of a Fast Atom Beam Etching Machine
Author/Editor: 堀江, 三喜男
HORIE, MIKIO
Author Heading: 堀江, 三喜男
HORIE, MIKIO
Publication, Distribution, etc.: Micro System Technologies 2003 (International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components),Herbert Reichl(Editor),2003 Franzis Verlag GmbH, 85586 Point, ISBN 3-7723-7020-9
Publication Date: 2003
Publication Date (W3CDTF): 2003
Periodical title: Micro System Technologies 2003, International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components
Pages: 334-341
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:00092750
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ