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図書

ベローズとシリンダから成る粗微動空気圧アクチュエータによるサブナノポジショニング

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ベローズとシリンダから成る粗微動空気圧アクチュエータによるサブナノポジショニング

Material type
図書
Author
川嶋, 健嗣ほか
Publisher
株式会社 エヌ・ティー・エス
Publication date
2011-08
Material Format
Paper
Capacity, size, etc.
-
NDC
-
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Notes on use

Note (General)：

identifier:oai:t2r2.star.titech.ac.jp:50146899

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Paper

Material Type
図書
Title
ベローズとシリンダから成る粗微動空気圧アクチュエータによるサブナノポジショニング
Author/Editor
川嶋, 健嗣
Kawashima, Kenji
藤田, 壽憲
FUJITA, TOSHINORI
Author Heading
川嶋, 健嗣
Kawashima, Kenji
藤田, 壽憲
FUJITA, TOSHINORI
Publication, Distribution, etc.
株式会社 エヌ・ティー・エス
Publication Date
2011-08
Publication Date (W3CDTF)
2011-08
Periodical title
アクチュエータ研究開発の最前線
Pages
136-142
Text Language Code
jpn