Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors

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Material Type: 図書
Title: Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors
Author/Editor: Chang, Tso-Fu Mark
陳, 君怡
Chen, Chun Yi
Tang, Hao-Chun
葭葉, 将治
Yoshiba, Masaharu
名越, 貴志
Nagoshi, Takashi
山根, 大輔
Yamane, Daisuke
町田, 克之
Machida, Katsuyuki
益, 一哉
Masu, Kazuya
曽根, 正人
Sone, Masato
Author Heading: Chang, Tso-Fu Mark
陳, 君怡
Chen, Chun Yi
Tang, Hao-Chun
葭葉, 将治
Yoshiba, Masaharu
名越, 貴志
Nagoshi, Takashi
山根, 大輔
Yamane, Daisuke
町田, 克之
Machida, Katsuyuki
益, 一哉
Masu, Kazuya
曽根, 正人
Sone, Masato
Publication, Distribution, etc.: IFSA Publishing
Publication Date: 2017-12
Publication Date (W3CDTF): 2017-12
Periodical title: Advances in Microelectronics Reviews
No. or year of volume/issue: 1 No.
Volume: 1
Issue: No.
Pages: 93-106
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50381181
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ