Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors

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Material Type: 図書
Title: Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors
Author/Editor: Chang, Tso-Fu Mark
陳, 君怡
Chen, Chun Yi
石塚, 陽大
Ishizuka, Yota
寺西, 美波
Teranishi, Minami
鈴木, 拓真
Suzuki, Takuma
山根, 大輔
Yamane, Daisuke
小西, 敏文
Konishi, Toshifumi
町田, 克之
Machida, Katsuyuki
益, 一哉
Masu, Kazuya
曽根, 正人
Sone, Masato
Author Heading: Chang, Tso-Fu Mark
陳, 君怡
Chen, Chun Yi
石塚, 陽大
Ishizuka, Yota
寺西, 美波
Teranishi, Minami
鈴木, 拓真
Suzuki, Takuma
山根, 大輔
Yamane, Daisuke
小西, 敏文
Konishi, Toshifumi
町田, 克之
Machida, Katsuyuki
益, 一哉
Masu, Kazuya
曽根, 正人
Sone, Masato
Publication, Distribution, etc.: IFSA Publishing
Publication Date: 2019-02
Publication Date (W3CDTF): 2019-02
Periodical title: Advances in Microelectronics Reviews
No. or year of volume/issue: 2 No.
Volume: 2
Issue: No.
Pages: 23-48
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50420172
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ