Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers

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Material Type: 図書
Title: Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers
Author/Editor: Chang, Tso-Fu Mark
中島, 英亮
Nakajima, Hideaki
陳, 君怡
Chen, Chun Yi
山根, 大輔
Yamane, Daisuke
小西, 敏文
Konishi, Toshifumi
伊藤, 浩之
Ito, Hiroyuki
町田, 克之
Machida, Katsuyuki
益, 一哉
Masu, Kazuya
Toshiyoshi, Hiroshi
曽根, 正人
Sone, Masato
Author Heading: Chang, Tso-Fu Mark
中島, 英亮
Nakajima, Hideaki
陳, 君怡
Chen, Chun Yi
山根, 大輔
Yamane, Daisuke
小西, 敏文
Konishi, Toshifumi
伊藤, 浩之
Ito, Hiroyuki
町田, 克之
Machida, Katsuyuki
益, 一哉
Masu, Kazuya
Toshiyoshi, Hiroshi
曽根, 正人
Sone, Masato
Publication, Distribution, etc.: IFSA PUBLISHING, S.L.
Publication Date: 2021-04
Publication Date (W3CDTF): 2021-04
Periodical title: Advances in Microelectronics: Reviews
No. or year of volume/issue: 3
Volume: 3
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50569454
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ