ECFマイクロポンプの高圧化の可能性について

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Material Type: 文書・図像類
Title: ECFマイクロポンプの高圧化の可能性について
Author/Editor: 横田, 眞一
YOKOTA, SHINICHI
金, 俊完
KIM, Joon-wan
Author Heading: 横田, 眞一
YOKOTA, SHINICHI
金, 俊完
KIM, Joon-wan
Publication Date: 2022-04
Publication Date (W3CDTF): 2022-04
Alternative Title: The potential on the high output pressure of the ECF micropumps
Periodical title: 機能性流体との融合化によるフルードパワーシステムの新展開に関する研究委員会研究成果報告書
Pages: 101-104
Text Language Code: jpn
Subject Heading: Fluid power, micro hydraulics, pump, high pressure
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50617137
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ