Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography

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Material Type: 文書・図像類
Title: Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography
Author/Editor: 田岡, 祐樹
Taoka, Yuki
河鰭, 康平
Kawabata, Kohei
HEMTHAVY, PASOMPHONE
崔, 勝萬
CHOI, SEUNGMAN
高橋, 邦夫
TAKAHASHI, KUNIO
齋藤, 滋規
SAITO, Shigeki
Author Heading: 田岡, 祐樹
Taoka, Yuki
河鰭, 康平
Kawabata, Kohei
HEMTHAVY, PASOMPHONE
崔, 勝萬
CHOI, SEUNGMAN
高橋, 邦夫
TAKAHASHI, KUNIO
齋藤, 滋規
SAITO, Shigeki
Publication Date: 2022-07
Publication Date (W3CDTF): 2022-07
Periodical title: International Journal of Automation Technology
No. or year of volume/issue: 16 No. 4
Volume: 16
Issue: No. 4
Pages: 471-477
Text Language Code: eng
Target Audience: 一般
Note (General): identifier:oai:t2r2.star.titech.ac.jp:50631463
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 東京工業大学 : 東京工業大学リサーチリポジトリ