Fabrication of Transparent Conductive Oxide Thin Films in the In-Ga-Zn-O and In-Sn-Zn-O Systems by Facing-Target DC-sputtering Technique

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Fabrication of Transparent Conductive Oxide Thin Films in the In-Ga-Zn-O and In-Sn-Zn-O Systems by Facing-Target DC-sputtering Technique

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https://repo.lib.tokushima-u.ac.jp/files/public/11/110939/20171130112624627393/k3110_abstract.pdf fulltext
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Material Type: 博士論文
Title: Fabrication of Transparent Conductive Oxide Thin Films in the In-Ga-Zn-O and In-Sn-Zn-O Systems by Facing-Target DC-sputtering Technique
Author/Editor: Wang, Xinzhi
Author Heading: Wang, Xinzhi
Publication Date: 2017-09-28
Publication Date (W3CDTF): 2017-09-28
Alternative Title: 対向ターゲット式DCスパッタリング法によるIn-Ga-Zn-OおよびIn-Sn-Zn-O系透明導電性酸化物薄膜の作製
Degree grantor/type: 徳島大学
Date Granted: 2017-09-28
Dissertation Number: 甲第3110号
Degree Type: 博士（工学）
Text Language Code: eng
Subject Heading: Wide bandgap semiconductors
thin films
DC sputtering
IGZO
ITZO
Target Audience: 一般
Format (IMT): application/pdf
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 徳島大学 : 徳島大学機関リポジトリ