電子分光法による電子材料及びデバイス製造プロセス評価に関する研究

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Material Type: 文書・図像類
Title: 電子分光法による電子材料及びデバイス製造プロセス評価に関する研究
Author/Editor: 中村, 誠
Author Heading: 中村, 誠
Publication, Distribution, etc.: 静岡大学大学院電子科学研究科
Publication Date: 2008-03-25
Publication Date (W3CDTF): 2008-03-25
Alternative Title: Study on evaluation of characteristics of ULSI materials and processes using electron spectroscopy
Periodical title: 静岡大学大学院電子科学研究科研究報告
No. or year of volume/issue: 29
Volume: 29
Pages: 65-67
ISSN (Periodical Title): PISSN : 03885070
Text Language Code: jpn
NDC: 541
Target Audience: 一般
Note (General): 博士学位論文の要旨学位記番号:工博甲第285号
甲第474号
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Access Restrictions: インターネット公開
Related Material: 000008474486
Periodical Title (NCID): AN00103168
https://ci.nii.ac.jp/ncid/AN00103168
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 静岡大学 : 静岡大学学術リポジトリ