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博士論文

Relationship between Electrical Characteristics and Crystallographic Properties in Pseudo-Single-Crystal Silicon Thin-Film Transistors Fabricated by Phase-Modulated Excimer Laser Annealing

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Relationship between Electrical Characteristics and Crystallographic Properties in Pseudo-Single-Crystal Silicon Thin-Film Transistors Fabricated by Phase-Modulated Excimer Laser Annealing

Material type
博士論文
Author
三谷, 昌弘
Publisher
Nara Institute of Science and Technology
Publication date
2014-03-24
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
奈良先端科学技術大学院大学,博士(工学)
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    naistar : NAIST Academic Repository

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Digital

Material Type
博士論文
Title
Relationship between Electrical Characteristics and Crystallographic Properties in Pseudo-Single-Crystal Silicon Thin-Film Transistors Fabricated by Phase-Modulated Excimer Laser Annealing
Author/Editor
三谷, 昌弘
Author Heading
三谷, 昌弘 ミタニ, マサヒロ
Publication, Distribution, etc.
Nara Institute of Science and Technology
Publication Date
2014-03-24
Publication Date (W3CDTF)
2014-03-24
Alternative Title
位相変調エキシマレーザーアニーリングで作製した擬似単結晶シリコン薄膜トランジスタの電気的特性と結晶学的特性の関係の研究
イソウ ヘンチョウ エキシマレーザー アニーリング デ サクセイシタ ギジ タンケッショウ シリコン ハクマク トランジスタ ノ デンキテキ トクセイ ト ケッショウガクテキ トクセイ ノ カンケイ ノ ケンキュウ
Degree grantor/type
奈良先端科学技術大学院大学
Date Granted
2014-03-24