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文書・図像類

高Al組成AlGANのエピタキシャル成長と欠陥制御技術

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高Al組成AlGANのエピタキシャル成長と欠陥制御技術

Material type
文書・図像類
Author
平松, 和政ほか
Publisher
三重大学
Publication date
2011-04-22
Material Format
Digital
Capacity, size, etc.
-
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application/pdf平成18~22年度科学研究費補助金(特定領域研究)研究成果報告書18069006

Detailed bibliographic record

Summary, etc.:

本研究では、サファイア上のAlNエピタキシャル結晶上へのAlN及び高Al組成AlGaNの低欠陥密度結晶を作製する技術を確立し、高品質高Al組成AlGaN、無極性AlGaN、クラックフリーAlN基板を得ることができた。また、サファイア上のAlNエピタキシャル結晶上への高Al組成AlGaNを用いた電子線...

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Digital

Material Type
文書・図像類
Author/Editor
平松, 和政
三宅, 秀人
元垣内, 敦司
宮川, 鈴衣奈
馬, ベイ
劉, 玉懐
黎, 大兵
呉, 潔君
胡, 衛国
Publication, Distribution, etc.
Publication Date
2011-04-22
Publication Date (W3CDTF)
2011-04-22
Text Language Code
jpn
Target Audience
一般