高耐圧パワー集積回路を目指したSiC金属-絶縁膜-半導体素子の基礎研究
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- Material Type
- 博士論文
- Title Transcription
- コウタイアツ パワー シュウセキ カイロ オ メザシタ SiC キンゾク - ゼツエンマク - ハンドウタイ ソシ ノ キソ ケンキュウ
- Author/Editor
- Noborio, Masato
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2009-03-23
- Publication Date (W3CDTF)
- 2009-03-23
- Alternative Title
- Fundamental Study on SiC Metal-Insulator-Semiconductor Devices for High-Voltage Power Integrated Circuits
- Contributor
- 木本, 恒暢鈴木, 実藤田, 静雄