フルオロカーボンプラズマによる酸化シリコンエッチングにおけるプラズマ－表面相互作用の数値解析

Name of awarding university/degree: 京都大学,博士(工学),Doctor of Philosophy (Engineering)

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Material Type: 博士論文
Title: フルオロカーボンプラズマによる酸化シリコンエッチングにおけるプラズマ－表面相互作用の数値解析
Author/Editor: Fukumoto, Hiroshi
Author Heading: Fukumoto, Hiroshi
Publication, Distribution, etc.: 京都大学 (Kyoto University)
Publication Date: 2012-05-23
Publication Date (W3CDTF): 2012-05-23
Alternative Title: Model Analysis of Plasma-Surface Interactions during Silicon Oxide Etching in Fluorocarbon Plasmas
Contributor: 斧, 髙一
稲室, 隆二
青木, 一生
Degree grantor/type: 京都大学
Date Granted: 2012-05-23
Dissertation Number: 甲第17064号
Degree Type: 博士(工学)
Doctor of Philosophy (Engineering)
Text Language Code: eng
Alias of Author: 福本, 浩志
フクモト, ヒロシ
Subject Heading: Fluorocarbon plasmas
Inductively coupled plasma
Plasma etching profile
Charging
NDC: 500
Target Audience: 一般
DOI: 10.14989/doctor.k17064
Format (IMT): application/pdf
Source: D_Fukumoto_Hiroshi.pdf （fulltext）
http://repository.kulib.kyoto-u.ac.jp/dspace/bitstream/2433/158076/2/D_Fukumoto_Hiroshi.pdf
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 京都大学 : 京都大学学術情報リポジトリ