低温プラズマプロセスを用いたイオン導電性薄膜の作製に関する研究
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- Uchimoto, Yoshiharu
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 1991-03-23
- Publication Date (W3CDTF)
- 1991-03-23
- Alternative Title
- A STUDY ON THE PREPARATION OF IONICALLY CONDUCTIVE THIN FILMS UTILIZING LOW TEMPERATURE PLASMA PROCESSES
- Contributor
- 竹原, 善一郎一瀬, 光之尉岩崎, 又衛
- Degree grantor/type
- 京都大学