微小部品の機械的特性を評価するマイクロテスティング法の開発研究

Material type: 文書・図像類

Author: 尾田, 十八ほか

Publisher: 金沢大学工学部

Publication date: 1998-03-01

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Note (General)：: 本研究では現在多方面で利用されている電子デバイス等の構成材料としてのマイクロマテリアルに対して,その機械的特性を評価する方法,いわゆるマイクロテスティング法の開発を次のように進めた. 1.マイクロテスティング法のための力学的手法の開発薄膜材料を対象とし、かつそれを含む超小構造体として積層構造モデル...

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https://kaken.nii.ac.jp/search/?qm=30019749

https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555029/

https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-07555029/075550291997kenkyu_seika_hokoku_gaiyo/

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Material Type: 文書・図像類
Title: 微小部品の機械的特性を評価するマイクロテスティング法の開発研究
Author/Editor: 尾田, 十八
Oda, Juhachi
Author Heading: 尾田, 十八
Oda, Juhachi
Publication, Distribution, etc.: 金沢大学工学部
Publication Date: 1998-03-01
Publication Date (W3CDTF): 1998-03-01
Alternative Title: Study of micro-testing method evaluating mechanical properties of micro-elements
Periodical title: 平成9(1997)年度科学研究費補助金基盤研究(A) 研究成果報告書 = 1997 Fiscal Year Final Research Report
No. or year of volume/issue: 1995-1997
Volume: 1995-1997
Pages: 39p.-
Text Language Code: jpn
Subject Heading: マイクロマテリアル
マイクロテスティング
マイクロマシン
薄膜
引張試験
せん断強さ
2軸引張強さ
逆解析
Micro-material
Micro-testing
Micro-machine
Thin film
Tensile test
Shearing strength
Inverse analysis
Bi-axial tensile strength
Target Audience: 一般
Note (General): 本研究では現在多方面で利用されている電子デバイス等の構成材料としてのマイクロマテリアルに対して,その機械的特性を評価する方法,いわゆるマイクロテスティング法の開発を次のように進めた. 1.マイクロテスティング法のための力学的手法の開発薄膜材料を対象とし、かつそれを含む超小構造体として積層構造モデルを考え,これ特有の応力・ひずみ解析法を提示した.具体的には「多層構造体の有限要素法」と「多層ばり理論」を提示し,その応用例も示した. 2.薄膜のヤング率と引張り強さ推定法の開発基板に平行部を有する特異な形状の薄膜を形成し,それを引張試験し,薄膜平行部の変位と2層試験片の全荷重を求めることによって,薄膜の破断までに至る全応力-ひずみ挙動を推定する方法を提示した.またその有効性を紙フェノール基板に銅箔が蒸着されたポジ感光基板をモデル材料として実際に試験し,明らかにした. 3.薄膜のせん断強さおよび2軸引張強さ推定法の開発一軸引張試験を行うことで,薄膜の面内せん断強さや2軸引張強さを測定する新しい方法を提示した.それは目的とするせん断応力や2軸引張応力場を生じさせる形状をトポロジカルな位相決定問題と考え,それに対してFEMと最適化手法を応用して求めたものである. In this study, theoretical techniques to analyze dynamically the micro-elements and new micro-testing methods evaluating the mechanical properties are proposed. These studies are as follows ; 1. Studies of theoretical techniques to analyze dynamically micro-elements A special finite element method and a special beam theory for multiple laminated structures are proposed. These methods are used for the stress anlyses of multiple laminated structures composed of thin films and plates. 2. Studies of new tensile test method for thin films A tensile test specimen composed of thin film with parallel part and matrix plate is proposed. By measuring the displacement at the parallel part of film and the total tensile force of specimen, the stress-strain relation of film is obtained inverse-analytically. 3. Studies of new shearing and bi-axial tensile test methods for thin films In spite of an uni-axial tensile test, the stress condition in the object part of specimen is pure shear of bi-axial tensile stress. Such an unique specimen can be determined by using topological potimization techniques. On the new shearing test specimen, the validity is examined by using AI plate.
In this study, theoretical techniques to analyze dynamically the micro-elements and new micro-testing methods evaluating the mechanical properties are proposed. These studies are as follows ;1. Studies of theoretical techniques to analyze dynamically micro-elementsA special finite element method and a special beam theory for multiple laminated structures are proposed. These methods are used for the stress anlyses of multiple laminated structures composed of thin films and plates.2. Studies of new tensile test method for thin filmsA tensile test specimen composed of thin film with parallel part and matrix plate is proposed. By measuring the displacement at the parallel part of film and the total tensile force of specimen, the stress-strain relation of film is obtained inverse-analytically.3. Studies of new shearing and bi-axial tensile test methods for thin filmsIn spite of an uni-axial tensile test, the stress condition in the object part of specimen is pure shear of bi-axial tensile stress. Such an unique specimen can be determined by using topological potimization techniques. On the new shearing test specimen, the validity is examined by using AI plate.
研究課題/領域番号:07555029, 研究期間(年度):1995–1997, 平成9(1997)年度科学研究費補助金基盤研究(A) 研究成果報告書の一部(概要)を掲載.
出典：「微小部品の機械的特性を評価するマイクロテスティング法の開発研究」研究成果報告書　課題番号07555029(KAKEN：科学研究費助成事業データベース（国立情報学研究所）)　　　本文データは著者版報告書より作成
DOI: 10.24517/00034867
Access Restrictions: 限定公開
Related Material: https://kaken.nii.ac.jp/search/?qm=30019749
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555029/
https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-07555029/075550291997kenkyu_seika_hokoku_gaiyo/
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 金沢大学 : 金沢大学学術情報リポジトリKURA