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規格・テクニカルリポート類

低エネルギーXe原子による炭素スパッタリングの分子動力学シミュレーション

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低エネルギーXe原子による炭素スパッタリングの分子動力学シミュレーション

Material type
規格・テクニカルリポート類
Author
村本, 哲也ほか
Publisher
宇宙航空研究開発機構
Publication date
2010-02-26
Material Format
Digital
Capacity, size, etc.
-
NDC
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Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetimeIn or...

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Material Type
規格・テクニカルリポート類
Author/Editor
村本, 哲也
剣持, 貴弘
百武, 徹
西田, 迪雄
Muramoto, Tetsuya
Kenmotsu, Takahiro
Hyakutake, Toru
Nishida, Michio
Publication, Distribution, etc.
Publication Date
2010-02-26
Publication Date (W3CDTF)
2010-02-26
Alternative Title
MD Simulation of Carbon Sputtering under Low-energy Xe Ion Bombardment
Periodical title
宇宙航空研究開発機構研究開発報告: イオン加速グリッド耐久認定用数値解析 JIEDI (JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集
No. or year of volume/issue
JAXA-RR-09-004
Volume
JAXA-RR-09-004
ISSN (Periodical Title)
ISSN : 1349-1113
Text Language Code
jpn
Target Audience
一般
Note (General)
Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetime
In order to develop the sputtering database to estimate the erosion of accelerator grids of an ion engine, the low-energy sputtering of carbon material with Xe ion is studied through molecular dynamics (MD) simulations. For the normal incidence, the MD result of sputtering yield almost agrees with the experimental result by Williams et al. (AIAA-2004-3788). However, the experimental result shows less incident angle dependence than the MD result. Because it seems that Xe ions in the experiment feel randomized surface normal vectors when the low-energy Xe ion caused many-body collisions to local surface atoms in rough surface. Thus, it is proper that the MD simulation in a smooth surface overestimates the incident angle dependence of sputtering yield. Hence, it is necessary to include the effect of surface roughness using Monte-Carlo simulation with the sputtering database for plane surface.
形態: カラー図版あり
Physical characteristics: Original contains color illustrations
資料番号: AA0064642003
レポート番号: JAXA-RR-09-004
Access Restrictions
インターネット公開
Data Provider (Database)
国立情報学研究所 : 学術機関リポジトリデータベース(IRDB)(機関リポジトリ)
Original Data Provider (Database)
宇宙航空研究開発機構 : 宇宙航空研究開発機構リポジトリ