低エネルギーXe原子による炭素スパッタリングの分子動力学シミュレーション

Material type: 文書・図像類

Author: 村本, 哲也ほか

Publisher: 宇宙航空研究開発機構

Publication date: 2010-02-26

Material Format: Digital

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Note (General)：: Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetimeIn or...

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Material Type: 文書・図像類
Title: 低エネルギーXe原子による炭素スパッタリングの分子動力学シミュレーション
Author/Editor: 村本, 哲也
剣持, 貴弘
百武, 徹
西田, 迪雄
Muramoto, Tetsuya
Kenmotsu, Takahiro
Hyakutake, Toru
Nishida, Michio
Author Heading: 村本, 哲也
剣持, 貴弘
百武, 徹
西田, 迪雄
Muramoto, Tetsuya
Kenmotsu, Takahiro
Hyakutake, Toru
Nishida, Michio
Publication, Distribution, etc.: 宇宙航空研究開発機構
Publication Date: 2010-02-26
Publication Date (W3CDTF): 2010-02-26
Alternative Title: MD Simulation of Carbon Sputtering under Low-energy Xe Ion Bombardment
Periodical title: 宇宙航空研究開発機構研究開発報告: イオン加速グリッド耐久認定用数値解析 JIEDI (JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集 = JAXA Research and Development Report
No. or year of volume/issue: JAXA-RR-09-004
Volume: JAXA-RR-09-004
ISSN (Periodical Title): ISSN : 1349-1113
Text Language Code: jpn
Subject Heading: Molecular Dynamics Simulation, Low-Energy Sputtering, Sputtering Database
Target Audience: 一般
Note (General): Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetime
In order to develop the sputtering database to estimate the erosion of accelerator grids of an ion engine, the low-energy sputtering of carbon material with Xe ion is studied through molecular dynamics (MD) simulations. For the normal incidence, the MD result of sputtering yield almost agrees with the experimental result by Williams et al. (AIAA-2004-3788). However, the experimental result shows less incident angle dependence than the MD result. Because it seems that Xe ions in the experiment feel randomized surface normal vectors when the low-energy Xe ion caused many-body collisions to local surface atoms in rough surface. Thus, it is proper that the MD simulation in a smooth surface overestimates the incident angle dependence of sputtering yield. Hence, it is necessary to include the effect of surface roughness using Monte-Carlo simulation with the sputtering database for plane surface.
形態: カラー図版あり
Physical characteristics: Original contains color illustrations
資料番号: AA0064642003
レポート番号: JAXA-RR-09-004
Source: https://jaxa.repo.nii.ac.jp/?action=repository_action_common_download&item_id=2084&item_no=1&attribute_id=31&file_no=1
https://jaxa.repo.nii.ac.jp/?action=repository_action_common_download&item_id=2084&item_no=1&attribute_id=31&file_no=1
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 宇宙航空研究開発機構 : 宇宙航空研究開発機構リポジトリ