多チャンネルQCMを用いたディファレンシャル・スパッタリングの計測

Material type: 規格・テクニカルリポート類

Author: 西村, 太一郎ほか

Publisher: 宇宙航空研究開発機構

Publication date: 2010-02-26

Material Format: Digital

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Note (General)：: 出版タイプ： NAWorkshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid life...

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Material Type: 規格・テクニカルリポート類
Title: 多チャンネルQCMを用いたディファレンシャル・スパッタリングの計測
Author/Editor: 西村, 太一郎
小泉, 宏之
國中, 均
山極, 芳樹
Nishimura, Taichiro
Koizumi, Hiroyuki
Kuninaka, Hitoshi
Yamagiwa, Yoshiki
Author Heading: 西村, 太一郎
小泉, 宏之
國中, 均
山極, 芳樹
Nishimura, Taichiro
Koizumi, Hiroyuki
Kuninaka, Hitoshi
Yamagiwa, Yoshiki
Publication, Distribution, etc.: 宇宙航空研究開発機構
Publication Date: 2010-02-26
Publication Date (W3CDTF): 2010-02-26
Alternative Title: Measurements of Differential Sputtering Yields Using Multi Channel Quartz Crystal Microbalance
Periodical title: 宇宙航空研究開発機構研究開発報告: イオン加速グリッド耐久認定用数値解析 JIEDI (JAXA Ion Engine Development Initiatives) ツールの研究開発ワークショップ論文集 = JAXA Research and Development Report
No. or year of volume/issue: JAXA-RR-09-004
Volume: JAXA-RR-09-004
ISSN (Periodical Title): ISSN : 1349-1113
Text Language Code: jpn
Subject Heading: Ion engine, Ion optics, Grid life time, Sputtering, QCM
Target Audience: 一般
Note (General): 出版タイプ： NA
Workshop on research and development of JIEDI (JAXA Ion Engine Development Initiatives) tool for numerical evaluation of ion engine grid lifetime
Life time assessment of an ion engine needs sputtering characteristics on grid material. Sputter yield on molybdenum due to xenon ion impingement was measured by a conventional weight loss technique using a miniature ion engine. New multiple Quartz crystal Microbalance (QCM) system, positioned in hemispherical on the target plane, revealed the differential sputtering yields. The resulted sputtering yields agreed with the data given by the other conventional methods.
形態: カラー図版あり
Physical characteristics: Original contains color illustrations
資料番号: AA0064642008
レポート番号: JAXA-RR-09-004
Periodical Title (NCID): AA1192675X
https://ci.nii.ac.jp/ncid/AA1192675X
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 宇宙航空研究開発機構 : 宇宙航空研究開発機構リポジトリ

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