「LSIプロセス診断技術」による民生用半導体部品の評価

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Material Type: 文書・図像類
Title: 「LSIプロセス診断技術」による民生用半導体部品の評価
Author/Editor: 矢部, 一博
田中, 大起
岡, 克己
久保山, 智司
松田, 純夫
Yabe, kazuhiro
Tanaka, Daiki
Oka, Katsumi
Kuboyama, Satoshi
Matsuda, Sumio
Author Heading: 矢部, 一博
田中, 大起
岡, 克己
久保山, 智司
松田, 純夫
Yabe, kazuhiro
Tanaka, Daiki
Oka, Katsumi
Kuboyama, Satoshi
Matsuda, Sumio
Publication, Distribution, etc.: 宇宙航空研究開発機構(JAXA)
Publication Date: 2003
Publication Date (W3CDTF): 2003
Alternative Title: The evaluation of commercial semiconductor devices by "The LSI Process Diagnosis Technology"
Text Language Code: jpn
Target Audience: 一般
Note (General): 第16回マイクロエレクトロニクスワークショップ(2003年10月24日)
資料番号: ARDS03045000
Related Material: https://eeepitnl.tksc.jaxa.jp/mews/jp/16th/pdf/presen/day02/07.pdf
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 宇宙航空研究開発機構 : 宇宙航空研究開発機構リポジトリ