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集積グラフェンNEMS複合機能素子によるオートノマス・超高感度センサーの開発

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集積グラフェンNEMS複合機能素子によるオートノマス・超高感度センサーの開発

Material type
文書・図像類
Author
水田, 博
Publisher
-
Publication date
2018-06-05
Material Format
Digital
Capacity, size, etc.
-
NDC
-
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Notes on use

Note (General):

原子層材料グラフェンを用いたナノ電子機械システム(GNEMS)作製技術と原子スケールシミュレーションを構築し、グラフェン表面上に物理吸着したCO2単分子による電気抵抗変化を室温で高速に検出するGNEMSセンサと、吸着分子による質量変化をゼプトグラム(10E-21 g)レベルで検出するGNEMSセンサ...

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Digital

Material Type
文書・図像類
Author/Editor
水田, 博
Author Heading
Publication Date
2018-06-05
Publication Date (W3CDTF)
2018-06-05
Alternative Title
Development of graphene NEMS hybrid functional devices for autonomous and ultrasensitive integrated sensors
Periodical title
科学研究費助成事業研究成果報告書
Pages
1-6
Text Language Code
jpn