ULSI配線のためのゼオライト含有ポーラスシリカ低誘電率膜の前駆体合成と膜形成

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Material Type: 博士論文
Title: ULSI配線のためのゼオライト含有ポーラスシリカ低誘電率膜の前駆体合成と膜形成
Author/Editor: 佐藤, 旦
Alternative Title: Precursor Synthesis and Film Formation of Mesoporous Pure Silica Zeolite Low-k Films for ULSI Interconnects
Degree grantor/type: 広島大学
Hiroshima University
Dissertation Number: 甲第7665号
Degree Type: 博士(工学)
Target Audience: 一般
Note (General): 内容の要旨, 審査の要旨
Access Restrictions: インターネット公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 広島大学 : 広島大学学術情報リポジトリ