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Coulomb blockade effects and conduction mechanism in extremely thin polycrystalline-silicon wires

Material type
記事
Author
Kawamura, Kensakuほか
Publisher
American Institute of Physics
Publication date
2002-04-15
Material Format
Digital
Journal name
Journal of Applied Physics 91 8
Publication Page
p.5213-5220
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Detailed bibliographic record

Summary, etc.:

<jats:p>Narrow (⩾95 nm) and extremely thin (∼7 nm) heavily phosphorous-doped polycrystalline-silicon (poly-Si) wires were fabricated by low-pressure c...

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  • Hiroshima University Institutional Repository

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Bibliographic Record

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Digital

Material Type
記事
Publication Date
2002-04-15
Publication Date (W3CDTF)
2002-04-15
Periodical title
Journal of Applied Physics
No. or year of volume/issue
91 8
Volume
91
Issue
8
Pages
5213-5220