原子間力顕微鏡(AFM)と透過型電子顕微鏡(TEM)を用いたシリコン単結晶のマイクロ摩耗プロセスの解明

Material type: 文書・図像類

Author: 高木, 誠ほか

Publisher: 愛知工業大学

Publication date: 2013-09-30

Material Format: Digital

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Note (General)：: The change of microstructure of a Si single crystal surface after scanning-scratching tests under very srnall loadingforces by AFM was investigated by...

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Material Type: 文書・図像類
Title: 原子間力顕微鏡(AFM)と透過型電子顕微鏡(TEM)を用いたシリコン単結晶のマイクロ摩耗プロセスの解明
Author/Editor: 高木, 誠
松室, 昭仁
岩田, 博之
Author Heading: 高木, 誠
松室, 昭仁
岩田, 博之
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 2013-09-30
Publication Date (W3CDTF): 2013-09-30
Alternative Title: ゲンシカンリョクケンビキョウ AFM トトウカガタデンシケンビキョウ TEM オモチイタシリコンタンケッショウノマイクロマサツプロセスノカイメイ
Study on Microwear Proass of Silicon Single Crystal Using AFM and TEM
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 15
Volume: 15
Pages: 67-71
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: jpn
Target Audience: 一般
Note (General): The change of microstructure of a Si single crystal surface after scanning-scratching tests under very srnall loadingforces by AFM was investigated by cross-sectional TEM observations in order to clarify the micro/nanowear process and the modification. The cross sectional TEM observations indicated wear process of Si single crystal;(1) introduction of dislocations and residual strain，and amorphization of Si single crystal， (2)the amorphous Si region was worn off and the formation of new amorphous Si phase became difficult.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/2797
Access Restrictions: 限定公開
Periodical Title (NCID): AA11484797
https://ci.nii.ac.jp/ncid/AA11484797
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ